Multiscale fracture models for silicon wafer manufacturing
1 : Cardiff University School of Engineering
(Cardiff ENGIN)
The Parade, CF243AA, Cardiff, UK -
United Kingdom
2 : Cardiff University
(CU)
-
Website
* : Corresponding author
Cardiff School of Engineering, Institute of Mechanics and Advanced Materials, Cardiff University, Queen's Buildings, The parade, Cardiff CF24 3AA, Wales, UK -
United Kingdom